3D Optical Nano Profilometer

An Optical 3D Nano Profilometer is an advanced, fully non-contact measurement system that combines optical technologies with imaging interferometry to enable nanoscale characterization of surface morphology, roughness, and step height. By completely eliminating physical contact with the sample, the system minimizes the risk of mechanical damage to sensitive specimens, including biological materials, polymers, adhesives, and transparent or semi-transparent surfaces, enabling measurements without introducing any physical disturbance. Key advantages of the system include broad compatibility with a wide range of materials, the ability to characterize complex geometries such as spherical surfaces, high measurement accuracy, and complete elimination of contact-related sample damage. The Nano-Profilometer offers a wide range of applications across both industry and research. It can be used in aerospace, automotive, biomedical engineering, optics and photonics, and metallurgy, particularly for coating-thickness measurements. Additional applications include 3D printing, microfluidic devices, materials research, geological studies, and the conservation and restoration of historical artifacts

Phylabs-Nano_profilometer.pdf 

Specification

Value

Specification

Value

3D Surface Measurement Method

White-Light Interferometry & Phase-Shifting Interferometry

Axial Piezo Travel Range

0–100 µm

Depth Measurement Accuracy

<5 nm

Lateral Measurement Accuracy

<630 nm

Axial Piezo Step Resolution

1 nm

Axial Position Stability

1 nm

Minimum Axial Step

1 nm

Sample Positioner

Motorized

Microscope Objective

Mirau, 10×, 20×, 40×, 50x

Field of View (10× Objective)

1 × 1 mm²

Sample Positioner Step Resolution

5 µm

Sample Positioner Travel

15 mm per axis

Camera

5 MP, Monochrome

Light Source

ELD with Variable Intensity & Aperture

Central Wavelength

620–650 nm

Control

Computer & User Control via Software

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